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Effect of capping layers on activation of As/Be-implanted semi-insulating InP:Fe
Effect of capping layers on activation of As/Be-implanted semi-insulating InP:Fe
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MARC
008000612s1999 ulk AC 000a KOR■090 ▼a569▼b이25ㅇ
■1001 ▼a이동수
■24510▼aEffect of capping layers on activation of As/Be-implanted semi-insulating InP:Fe▼d李同洙
■260 ▼a서울▼b高麗大學校 大學院▼c1999.
■300 ▼a72 p.▼c26 cm.
■5021 ▼a학위논문(박사)▼b高麗大學校 大學院▼c마이크로머시닝學科▼d1999
■653 ▼aEFFECT▼aOF▼aCAPPING▼aLAYERS▼aON▼aACTIVATION▼aASBEIMPLANTED▼aSEMIINSULATING▼aINPFE
■9501 ▼a비매품