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Effect of capping layers on activation of As/Be-implanted semi-insulating InP:Fe
Effect of capping layers on activation of As/Be-implanted semi-insulating InP:Fe
- Material Type
- 학위논문
- Callnumber
- 569 이25ㅇ
- Author
- 이동수
- Title/Author
- Effect of capping layers on activation of As/Be-implanted semi-insulating InP:Fe / 李同洙
- Publish Info
- 서울 : 高麗大學校 大學院, 1999.
- Material Info
- 72 p. ; 26 cm.
- 학위논문주기
- 학위논문(박사) - 高麗大學校 大學院 : 마이크로머시닝學科, 1999
- Index Term-Uncontrolled
- EFFECT OF CAPPING LAYERS ON ACTIVATION ASBEIMPLANTED SEMIINSULATING INPFE
- Price Info
- 비매품
- Control Number
- kpcl:34195